Scanning near field optical microscope

摘要

To provide a scanning field optical microscope having a high resolution of less than a wavelength and being able to measure a locally excited luminescence, evanescent light is emitted on the sample surface using laser light source, lens, and prism . Optical waveguide probe comes close to the sample. Evanescent light is scattered, and detected by lens and photodetector. Two dimensional scanning carried out using XY scanning circuit and XY fine displacement element, and three dimensional picturing is carried out by data processing means.