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发明名称
SEKIGAISENSENSA
摘要
申请公布号
JP2655101(B2)
申请公布日期
1997.09.17
申请号
JP19940265703
申请日期
1994.10.28
申请人
NIPPON DENKI KK
发明人
ODA NAOKI
分类号
G01J1/02;G01J5/02;G01J5/20;H01L37/02;(IPC1-7):G01J1/02
主分类号
G01J1/02
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代理人
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