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发明名称
SUKEIRABURU*HYUUZU*RINKUSOSHINOKEISEIHOHO
摘要
申请公布号
JP2653672(B2)
申请公布日期
1997.09.17
申请号
JP19880134293
申请日期
1988.05.31
申请人
TEKISASU INSUTORUMENTSU INC
发明人
MAIKURU TOOMASU UERUCHI;RONARUDO AARU MATSUKUMAN;MANUERU RUISU TORENO JUNIA;EBARISUTO GARUSHIA JUNIA
分类号
H01L21/82;H01L27/10;(IPC1-7):H01L21/82
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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