发明名称 Ferroelectric element and method of producing the same
摘要 <p>To provide a ferroelectric element that can be highly densely integrated having a high Pr and a small Ec by using a ferroelectric thin film (32) of the perovskite structure. A large distortion is imparted to the crystalline lattices of a ferroelectric thin film (32) of the perovskite structure by using in combination the elements having dissimilar ionic radii for the A-site that constitutes crystalline lattices, for the B-site and for the C-site that produces polarization, in order to obtain a ferroelectric element of a structure in which the ferroelectric thin film (32) exhibiting a high spontaneous polarization and a small coercive electric field is sandwiched by the electrodes (31, 33). &lt;IMAGE&gt;</p>
申请公布号 EP0795898(A2) 申请公布日期 1997.09.17
申请号 EP19970103968 申请日期 1997.03.10
申请人 HITACHI, LTD. 发明人 NABATAME, TOSHIHIDE;SUZUKI, TAKAAKI;OISHI, TOMOJI;TAKAHASHI, KEN;MAEDA, KUNIHIRO
分类号 G01J5/02;C01G23/00;C01G25/00;C01G29/00;C01G33/00;C01G35/00;C01G37/00;C01G39/00;C01G41/00;C01G49/00;C01G51/00;C30B29/22;C30B29/24;C30B29/30;C30B29/32;G01J5/34;H01B3/00;H01B3/12;H01B5/14;H01L21/02;H01L21/314;H01L21/316;H01L21/8246;H01L27/105;(IPC1-7):H01L21/320 主分类号 G01J5/02
代理机构 代理人
主权项
地址