发明名称 |
Ferroelectric element and method of producing the same |
摘要 |
<p>To provide a ferroelectric element that can be highly densely integrated having a high Pr and a small Ec by using a ferroelectric thin film (32) of the perovskite structure. A large distortion is imparted to the crystalline lattices of a ferroelectric thin film (32) of the perovskite structure by using in combination the elements having dissimilar ionic radii for the A-site that constitutes crystalline lattices, for the B-site and for the C-site that produces polarization, in order to obtain a ferroelectric element of a structure in which the ferroelectric thin film (32) exhibiting a high spontaneous polarization and a small coercive electric field is sandwiched by the electrodes (31, 33). <IMAGE></p> |
申请公布号 |
EP0795898(A2) |
申请公布日期 |
1997.09.17 |
申请号 |
EP19970103968 |
申请日期 |
1997.03.10 |
申请人 |
HITACHI, LTD. |
发明人 |
NABATAME, TOSHIHIDE;SUZUKI, TAKAAKI;OISHI, TOMOJI;TAKAHASHI, KEN;MAEDA, KUNIHIRO |
分类号 |
G01J5/02;C01G23/00;C01G25/00;C01G29/00;C01G33/00;C01G35/00;C01G37/00;C01G39/00;C01G41/00;C01G49/00;C01G51/00;C30B29/22;C30B29/24;C30B29/30;C30B29/32;G01J5/34;H01B3/00;H01B3/12;H01B5/14;H01L21/02;H01L21/314;H01L21/316;H01L21/8246;H01L27/105;(IPC1-7):H01L21/320 |
主分类号 |
G01J5/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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