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发明名称
RIIDOFUREEMUNOSEIZOHOHO
摘要
申请公布号
JP2654881(B2)
申请公布日期
1997.09.17
申请号
JP19910342056
申请日期
1991.11.29
申请人
MITSUI HAITETSUKU KK
发明人
FUJITA KATSUFUSA
分类号
C23F1/00;H01L23/50;(IPC1-7):H01L23/50
主分类号
C23F1/00
代理机构
代理人
主权项
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