| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce the weight of an X table to reduce the inertia force of the X table by arranging a drive motor for the Y axis on the bed on which the X table is provided and transmitting the drive force of the drive motor for Y axis to the ball screw for driving a Y table through a ball spline shaft and a bevel gear. SOLUTION: An X table 2 is arranged so as to reciprocate on orbital rails through a slider 13 in the X direction. A plurality of track rails, i.e., orbital rails 8, are fixed to the X table 2 by bolts, etc., in parallel with each other. A slider 7 is fixed to the lower face of a Y table 1. The slider 7 is mounted on the orbital rails r so as to slidably move. Therefore, the Y table 1 reciprocate through the slider 7 in the Y axis direction orthogonal to the X axis direction. Positioning is made by moving the equipment attached on this Y table 1 to a specified position on a flat plane.</p> |
