| 摘要 |
<p>PURPOSE: To eliminate the clogging caused by the generation of a powder by simple constitution and to perfectly remove mixed gas containing a plurality of hydride gases to detoxify the same. CONSTITUTION: Mixed gas containing at least two or more kinds of hydride gases is brought into contact with nickel fluoride and nickel to be decomposed and/or adsorbed to be removed. Further, hydride gases of the group III or V elements are brought into contact with nickel to be decomposed and/or adsorbed to be removed.</p> |
