METHOD OF MANUFACTURING A STAMPER

摘要

A method of manufacturing a stamper includes the steps of coating a surface of a substrate with photo-sensitive material; directing light to a specified position on the photosensitive material to expose it; developing the photosensitive material to produce a minute photoresist pattern; etching the substrate to a specified depth with a mask of the photoresist pattern; removing the mask of photoresist to produce a glass master; arbitrarily forming a first nickel layer on a surface of the glass master; forming an intermediate layer of a metal having a lower linear expansion coefficient than nickel over the first nickel layer or on the glass master; forming a second nickel layer on the intermediate layer to form a conductive film having a two- or three-stratum structure; arbitrarily subjecting the whole substrate to a process to make nickel passive; forming an electroformed layer on the conductive film by an electroforming process; and separating the conductive film from the glass master.