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发明名称
SUBSTRAT MIT EINER POLYKRISTALLINEN DIAMANTSCHICHT UND VERFAHREN ZU SEINER HERSTELLUNG
摘要
申请公布号
ATA53996(A)
申请公布日期
1997.09.15
申请号
AT19960000539
申请日期
1996.03.25
申请人
ELECTROVAC, FABRIKATION ELEKTROTECHNISCHER SPEZIALARTIKEL GESELLSCHAFT M.B.H.
发明人
HOLZER HERMANN DIPL.ING.;HAUBNER ROLAND DR.;LUX BENNO DR.;NECHANSKY HELMUT DR.
分类号
C23C16/02;C23C16/26;C23C16/27;(IPC1-7):C23C16/02
主分类号
C23C16/02
代理机构
代理人
主权项
地址
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