| 摘要 |
<p>A mounting system (10), for supporting semiconductor process gas delivery and control components (26, 28, 30, 32) for assembly and use as a gas stick, aligns the connection union seals between fittings on adjacent components (26, 28, 30, 32) to absorb accumulated stresses resulting from manufacturing tolerances and reduce the likelihood of seal leakage. Components (26, 28, 30, 32) are mounted on individual upper clamp members (36) which are secured to lower clamp members (38) to form a slidable but non-rotatable radially aligned yoke around a rigid elongate support member (12) for subsequent longitudinal positioning and joining of adjacent fittings (25).</p> |
