Test system for three dimensional testing of object

摘要

The test system has an illumination pattern (12) applied in an illumination plane, which produces multi-illumination points. It has one or more optical elements (13o,13u), which image the illumination pattern in a focus plane at the place of the object (14) to be measured. A receiver array (17) records the light emitted from the optical elements, transmitted and or reflected at the object or by fluorescence. An array of anamorphotic lenses (66) are arranged before the receiver array. The illumination pattern is designed with a pattern size related to the array of anamorphotic lenses, which corresponds with the pattern size of the array of anamorphotic lenses, or is a whole number multiple of this.