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发明名称
Randbelichtungsverfahren für Halbleiterscheiben
摘要
申请公布号
DE69031212(D1)
申请公布日期
1997.09.11
申请号
DE19906031212
申请日期
1990.03.23
申请人
USHIO DENKI K.K., TOKIO/TOKYO, JP
发明人
ARAI, TESUJI, YOKOHAMA-SHI, KANAGAWA 227, JP;SUZUKI, SHINJI, KAWASAKI-SHI, KANAGAWA 214, JP
分类号
G03F7/16;G03F7/20;(IPC1-7):G03F7/16
主分类号
G03F7/16
代理机构
代理人
主权项
地址
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