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发明名称
Herstellung von submikrometrischen Anordnungen
摘要
申请公布号
DE69221350(D1)
申请公布日期
1997.09.11
申请号
DE1992621350
申请日期
1992.03.13
申请人
AT & T CORP., NEW YORK, N.Y., US
发明人
WHITE, DONALD LAWRENCE, LAKE PARSIPPANY, NEW JERSEY 07054, US
分类号
G03F1/28;H01L21/027;(IPC1-7):G03F1/14
主分类号
G03F1/28
代理机构
代理人
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