发明名称 KANKOSEISOSEIBUTSU
摘要 PURPOSE:To obtain a negative photosensitive composition having high sensitivity, with the strength of a film at its picture part increased and excellent in wear resistance by incorporating specified photo-crosslinkable high molecular compd. and surface-reformed silica particle. CONSTITUTION:A photo-crosslinkable high molecular compd. having a photo- crosslinkable group shown by formula I and a surface-reformed silica fine particle with at least one kind of functional group shown by formula II bonded chemically to its surface are incorporated. In formula I, T<1> and T<2> are hydrogen atom, halogen atom, alkyl or aryl, and a ring can be formed by T<1> and T<2>. In formula II, R is a bivaelent connecting group consisting of >=2 kinds selected from C, H, N, O, S and Si, and Y is at least a group shown by formula III. In formula III, Q<1> and Q<2> are halogen atom, alkyl or aryl. Consequently, a high-sensitivity composition capable of obtaining a sufficient picture even with a short exposure time, with the film strength at the picture part increased and excellent in wear resistance is obtained.
申请公布号 JP2652095(B2) 申请公布日期 1997.09.10
申请号 JP19910249815 申请日期 1991.09.27
申请人 FUJI SHASHIN FUIRUMU KK 发明人 KUNIDA KAZUTO;AOSHIMA KEITARO
分类号 G03F7/00;G03F7/004;G03F7/038;G03F7/075;H01L21/027;H01L21/30;(IPC1-7):G03F7/075 主分类号 G03F7/00
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