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发明名称
HAKUMAKUDENKAIKOKASOSHI
摘要
申请公布号
JP2650946(B2)
申请公布日期
1997.09.10
申请号
JP19880049659
申请日期
1988.03.04
申请人
HITACHI SEISAKUSHO KK
发明人
SHIMADA JUICHI;ITO HARUO;MATSUBARA SUNAO;MURAMATSU SHINICHI
分类号
H01L27/12;H01L29/78;H01L29/786;(IPC1-7):H01L29/786
主分类号
H01L27/12
代理机构
代理人
主权项
地址
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