发明名称 LASER SYSTEM AND METHOD FOR FUNCTIONAL TRIMMING OF FILMS AND DEVICES
摘要 <p>A laser system (50) and processing method exploit a wavelength range (40) in which devices, including any semiconductor material-based devices (10) affected by conventional laser wavelengths and devices having light-sensitive or photo-electronic portions integrated into their circuits, can be effectively functionally trimmed without inducing performance drift or malfunctions in the processed devices. True measurement values of operational parameters of the devices can, therefore, be obtained without delay for device recovery, i.e., can be obtained substantially instantaneously with laser impingement. Accordingly, the present invention allows faster functional laser processing, eases geometric restrictions on circuit design, and facilitates production of denser and smaller devices.</p>
申请公布号 EP0793557(A1) 申请公布日期 1997.09.10
申请号 EP19950940776 申请日期 1995.11.20
申请人 ELECTRO SCIENTIFIC INDUSTRIES, INC. 发明人 SUN, YUNLONG;SWENSON, EDWARD, J.
分类号 B23K26/00;B23K26/06;(IPC1-7):B23K26/00 主分类号 B23K26/00
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