Semiconductor chemical sensor device and method of forming a thermocouple for a semiconductor chemical sensor device

摘要

A semiconductor chemical sensor device (2) comprises a sensitive layer (4) for detecting specific chemicals and a heater for heating the sensitive layer, which is formed by a heater portion (6) of a conductive layer (8) in the semiconductor chemical sensor device (2). The semiconductor chemical sensor device (2) further comprises a thermocouple (12) for detecting the temperature of the sensitive layer (4), the thermocouple comprising a P/N junction (14) formed as part of or adjacent the heater portion (6) of the conductive layer (8) such that a signal developed across the P/N junction (14) is representative of the temperature of the sensitive layer (4). <IMAGE>