| 摘要 |
<p>PURPOSE:To execute shift printing and to reduce the cost by forming alignment marks corresponding to the number of each color by a material having large photoabsorptivity in a long wavelength area in which pattern groups of each pattern have large phototransmissivity, respectively. CONSTITUTION:Alignment marks 10R, 20G, etc., corresponding to the number of each color are formed by a material having large photoabsorptivity in a long wavelength area (for instance, 700-800nm) in which pattern groups of each color have large phototransmissivity, respectively, and also, its alignment itself is executed by using a light beam of such a specific long wavelength area. Therefore, what is called shift printing can be executed effectively, and the cost of a color filter can be reduced. Especially, this method can be performed by changing an attached part such as replacing a sensor for an alignment, and can be applied easily to a conventional automatic aligning device, as well.</p> |
