COOLING SYSTEM OF SUBSTRATES IN VACUUM,申请号RU19930053795-传众专利搜索

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发明名称	COOLING SYSTEM OF SUBSTRATES IN VACUUM
摘要
申请公布号	RU2089662(C1)	申请公布日期	1997.09.10
申请号	RU19930053795	申请日期	1993.11.29
申请人	MOSKOVSKIJ GOSUDARSTVENNYJ INSTITUT ELEKTRONIKI I MATEMATIKI (TEKHNICHESKIJ UNIVERSITET)	发明人	VOLOGIROV ALI G;IVASHOV EVGENIJ N;ORINCHEV SERGEJ M;SLEPTSOV VLADIMIR V;STEPANCHIKOV SERGEJ V
分类号	C23C14/50;(IPC1-7):C23C14/50	主分类号	C23C14/50
代理机构		代理人
主权项
地址

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