| 摘要 |
PURPOSE:To form a film of a uniform thickness by fitting a gate value to a part connecting an exhaust pipe for evacuation to a vacuum reaction vessel so as to eliminate a dead space and to prevent the turbulence of a gas flow. CONSTITUTION:A rotatable member for holding a photosensitive drum is set at the inside of a cylindrical or circular arc-shaped electrode 3 set in a vacuum reaction vessel 1. An exhaust pipe 15 for exhausting gas and an exhaust pipe 7 for evacuation are separately connected to the side wall of the vessel 1 and a gate valve 12 is fitted to the part connecting the pipe 7 to the vessel 1. |
