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经营范围
发明名称
Transistor isolation process.
摘要
申请公布号
EP0618616(A3)
申请公布日期
1997.09.10
申请号
EP19940103189
申请日期
1994.03.03
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
KRAUTSCHNEIDER, WOLFGANG;KLINGENSTEIN, WERNER
分类号
H01L21/76;H01L21/762;H01L21/82;H01L21/822;H01L21/8234;H01L27/04;H01L27/118;(IPC1-7):H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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