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发明名称
HANDOTAIENERUGIIKENSHUTSUKI
摘要
申请公布号
JP2651323(B2)
申请公布日期
1997.09.10
申请号
JP19920195594
申请日期
1992.07.22
申请人
HAMAMATSU HOTONIKUSU KK
发明人
MURAMATSU MASAHARU
分类号
G01J1/02;G01J5/28;H01L27/14;H01L31/09;(IPC1-7):H01L27/14
主分类号
G01J1/02
代理机构
代理人
主权项
地址
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