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发明名称
CHODENDOTORANJISUTA
摘要
申请公布号
JP2651143(B2)
申请公布日期
1997.09.10
申请号
JP19870008182
申请日期
1987.01.19
申请人
HITACHI SEISAKUSHO KK
发明人
HATANO MUTSUKO;NISHINO JUICHI
分类号
H01L29/43;C01G1/00;C01G33/00;H01L21/28;H01L21/338;H01L29/778;H01L29/80;H01L29/812;H01L39/22;(IPC1-7):H01L39/22
主分类号
H01L29/43
代理机构
代理人
主权项
地址
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