| 摘要 |
PURPOSE:To inhibit generation of pin-holes in a transparent electroconductive film by building a metallic electrode consisting of a specified metal on the transparent electroconductive film in layer. CONSTITUTION:A metallic electrode 3 consisting of at least one kind among Mo, Ti, Cr, Ta, W, and Ni is built in layer by sputtering, photolithography, or etching on an ITO transparent electroconductive film 2 on a glass substrate 1. By this method, generation of pin-holes in the film 2 due to a chemical reaction with the ITO is inhibited similarly as a case using Al. Further, the adhesion of the electrode 3 consisting of these metals to the film 2 is high, so liquid crystal panel having high reliability are obtd. with satisfactory yield. |
