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经营范围
发明名称
HAISENYOTOTSUBUNOTAKASAKENSAHOHO
摘要
申请公布号
JP2652705(B2)
申请公布日期
1997.09.10
申请号
JP19890175278
申请日期
1989.07.06
申请人
TOKYO EREKUTORON KK
发明人
IINO SHINJI
分类号
G01R31/302;G01B7/00;H01L21/321;H01L21/60;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R31/302
代理机构
代理人
主权项
地址
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