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发明名称
Gas flow system for CVD reactor
摘要
申请公布号
EP0671484(B1)
申请公布日期
1997.09.10
申请号
EP19940301700
申请日期
1994.03.10
申请人
GI CORPORATION
发明人
CHAN, JOSEPH;GARBIS, DENNIS;SAPIO, JOHN;LATZA, JOHN
分类号
C23C16/44;C23C16/455;C30B25/14;(IPC1-7):C23C16/44
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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