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发明名称
SOHOGATAHAKUMAKUTORANJISUTAOYOBISONOSEIZOHOHO
摘要
申请公布号
JP2653092(B2)
申请公布日期
1997.09.10
申请号
JP19880071272
申请日期
1988.03.25
申请人
SEIKOO EPUSON KK
发明人
ISHIGURO HIDETO
分类号
H01L21/8238;H01L27/08;H01L27/092;H01L29/78;H01L29/786;(IPC1-7):H01L29/786;H01L21/823
主分类号
H01L21/8238
代理机构
代理人
主权项
地址
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