| 摘要 |
PROBLEM TO BE SOLVED: To connect a capillary to an optical fiber with high accuracy by forming a plurality of grooves in a surface of a substrate and bonding another substrate, thereby forming the capillary and a guide for connecting the optical fiber. SOLUTION: Grooves 3 and 4 are formed in a surface of a substrate 1. A substrate 2 is bonded to the substrate 1. As a result, a capillary and a guide are formed. An optical fiber 5 is inserted into the guide, and an end part of the optical fiber 5 is pressed to a bottom part of the guide. In this state, the optical fiber is fixed with the use of, e.g. an adhesive. The grooves 3 and 4 are processed by way of micro processing with are accuracy ofμm or higher. Since the optical fiber and capillary can be connected with the accuracy ofμm or higher accuracy, the amount and an area of a probe light projected to a minute detection part can be set at optimum values.
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