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发明名称
RESISTANCE EXOTHERMIC ELEMENT FOR SINGLE CRYSTAL GROWTH
摘要
申请公布号
JPH09235178(A)
申请公布日期
1997.09.09
申请号
JP19960071428
申请日期
1996.03.01
申请人
SUMITOMO SITIX CORP
发明人
KANDA TADASHI
分类号
C30B15/14;C30B29/06;H01L21/208;(IPC1-7):C30B15/14
主分类号
C30B15/14
代理机构
代理人
主权项
地址
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