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经营范围
发明名称
LASER MICROSCOPE
摘要
申请公布号
JPH09237814(A)
申请公布日期
1997.09.09
申请号
JP19960042258
申请日期
1996.02.29
申请人
JEOL LTD;NIPPON DENSHI RAIOSONITSUKU KK
发明人
UEDA KATSUHIDE
分类号
G01R31/26;G01R31/302;G02B21/00;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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