| 摘要 |
PROBLEM TO BE SOLVED: To provide a foreign matter correcting device which measures the distance to a color film surface in the condition where a polishing tape is brought into contact with a head to be polished, and polishes the tape while the thickness of the tape to be polished is corrected by the measured value. SOLUTION: A polishing head 12 is pressed against a color filter substrate by an air cylinder 22, the distance (a) between the color filter substrate and the polishing head 12 is measured by an air micro-sensor 24 provided on one end of the polishing head 12, the polishing head 12 is moved to the position of a projected foreign matter, the distance (b) to the color filter substrate is measured in that condition, and the air cylinder 22 is driven by a control device 26 so that the distance between the polishing head 12 and the color filter substrate is (b-a). |
