| 摘要 |
PROBLEM TO BE SOLVED: To prevent the reduction of ozone production by inhibiting a ceramic ozonizer from changing its performance caused by deposition of metal oxide on the surface of the dielectric ceramic with the passage of time. SOLUTION: A pair of dielectric layers made of ceramics (cathode) 31, 32 are arranged oppositely to form a discharging space 5 between them. An anode 4 is arranged between the discharge space 5 and the starting gas-feeding pipe 51 is connected to one side of the discharge space and the ozone gas taking out pipe 52 is connected to the other side. In addition, ion is injected to the opposing faces (discharging faces) of the dielectric layers 31, 32 to form surface layers injected with metal or metal oxide by 1×10<14> -1×10<17> ions/cm<2> .
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