METHOD FOR CORRECTING POSITION OF SAMPLE STAGE OF MICROSCOPE AND SAMPLE STAGE

摘要

PROBLEM TO BE SOLVED: To realize a method for correcting the moving stage of a microscope and a moving stage capable of easily securing U-centricity all over the area of a sample. SOLUTION: The respective coefficients of an expression for obtaining deviation in a direction Z are stored in a controller 15. In the case of actually observing a sample, the positions (x) and (y) of an observed part are fetched in the controller 15 from an X driving mechanism 4 and a Y driving mechanism 10 in the case the sample 13 is moved in directions X and Y and rotated, and further the rotational angle of a turntable 6 is fetched from a rotation driving mechanism 7 so as to arithmetically obtain the correction amount of the U- centricity in the direction Z by the coefficient stored in advance and the operation expression. The obtained correction amount is supplied to the driving mechanism 12 of a Z direction movable carriage 11, and the carriage 11 is adjusted to maintain the U-centricity.