| 摘要 |
PROBLEM TO BE SOLVED: To obtain a self-diagnostic method in which the self-diagnosis of an angular velocity sensor for vehicle control can be performed with high reliability by a method wherein a vibration amplitude or a drive amplitude is controlled to a value, for self- diagnosis, which is different from that in an operation. SOLUTION: A vibration mass 16 is connected to a common potential via a support part, and comb-tooth electrodes 20 are installed so as to be extended from its side face. Counter electrodes 18, 19 are installed so as to be faced on both side faces of every comb-tooth electrode 20 by keeping a prescribed interelectrode gap. The respective counter electrodes 18, 19 are electrically independent, and a capacitance is constituted between themselves and the vibration mass 16. The self-diagnosis of an angular velocity sensor is performed in such a way that its function is diagnosed by vibrating and driving the vibration mass 16 to the second axial direction of an orthogonal coordinate system or that its function is diagnosed by making the drive amplitude of the vibration mass variable in the first axial direction of the orthogonal coordinate system. Alternatively, a force in the third axial direction of the orthogonal coordinate system is applied to the vibration mass 16, and the moving support state of the vibration mass 16 is diagnosed. |
