FORMATION OF SOL-GEL THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a film forming method which continuously form a uniform optical thin film of about>=2μm and more particularly about >=1μm on a large- area substrate using a sol-gel liguid by a spin coating method. SOLUTION: A coating liquid for forming a thin film is dropped onto the surface of a substrate which is set on a spin coater and is under rotation in the film forming method which forms the sol-gel thin film by the spin coating method on the substrate. After the film is formed on the surface under spin rotation from the coating liquid, the spin rotation of the substrate is once stopped before the coating liquid formed as the film loses the flow property due to beginning of drying. The filmed coating liquid is leveled off by its own flow and the substrate is rotated at a low speed in the leveled-off state, by which the uniform film is formed.