发明名称 |
Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it |
摘要 |
A method for measuring the width of a tip in an Atomic Force Microscope/Scanning Tunneling Microscope using a calibration standard is provided. The method incorporates the steps of providing a tip, measuring the width b1 of a first kind of structure, and measuring the width b2 of a second kind of structure. The steps of measuring comprise the steps of profiling the first and second kinds of structures with a tip and calculating the width of the tip as a function of the measured widths b1 and b2. The calibration standard comprises the first and second kinds of structures and may be, for example, a trench and a raised line which have substantially the same width.
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申请公布号 |
US5665905(A) |
申请公布日期 |
1997.09.09 |
申请号 |
US19950472100 |
申请日期 |
1995.06.07 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BARTHA, JOHANN W.;BAYER, THOMAS;GRESCHNER, JOHANN;NONNENMACHER, DECEASED, MARTIN;WEISS, HELGA |
分类号 |
B32B9/00;G01B5/20;G01R31/26;H01L21/00;H01L21/311;H01L21/66;H01L21/76;(IPC1-7):G01B5/20 |
主分类号 |
B32B9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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