发明名称 Metal-semiconductor diode and process for preparing metal-semiconductor diodes
摘要 PCT No. PCT/EP95/01300 Sec. 371 Date Nov. 5, 1995 Sec. 102(e) Date Nov. 5, 1995 PCT Filed Apr. 8, 1995 PCT Pub. No. WO95/28743 PCT Pub. Date Oct. 26, 1995It is suggested for a metal-semiconductor diode that the depletion zone layer be grown epitaxially from deformed InxGa1-xAs with an indium content x increasing in the direction of the metal contact and/or that a diode area be delimited by surrounding insulation regions in a planar design consisting of a flat layer sequence and that the metal contact be provided on the surface of the layer sequence. Corresponding advantageous manufacturing processes are described.
申请公布号 US5665999(A) 申请公布日期 1997.09.09
申请号 US19950564312 申请日期 1995.11.05
申请人 DAIMLER BENZ AG 发明人 BRUGGER, HANS
分类号 G01S7/02;G01S7/03;H01L21/329;H01L29/872;(IPC1-7):H01L29/47 主分类号 G01S7/02
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