发明名称 Bump electrode, semiconductor integrated circuit device using the same, multi-chip module having the semiconductor integrated circuit devices and method for producing semicondutcor device having the bump electrode
摘要 A bump electrode includes a core portion provided on an intermediate electrode layer formed on an electrode pad formed on a surface of an element. The core portion contains a material having a Young's modulus less than that of soldering. An electrically conductive film covers the core portion.
申请公布号 US5666270(A) 申请公布日期 1997.09.09
申请号 US19940280327 申请日期 1994.07.25
申请人 FUJITSU LIMITED 发明人 MATSUDA, TATSUHARU;MINAMIZAWA, MASAHARU
分类号 H01L21/60;H01L23/485;(IPC1-7):H05K7/20 主分类号 H01L21/60
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