| 摘要 |
PROBLEM TO BE SOLVED: To form an optical waveguide having a refractive index close to that of silica and to enable fine control of refractive index by forming an optical waveguide including a metal-contg. siloxane polymer film by thermal polymn. of a metallic alkoxide added soln. for forming a siloxane polymer film on a substrate. SOLUTION: A metallic alkoxide added soln. for forming a siloxane polymer film is thermally polymerized on a substrate 1 to form an optical waveguide including a metal-contg. siloxane polymer film. That is, the siloxane polymer soln. is applied on the substrate 1 and heated to form a cladding layer 2 made of the siloxane polymer film. Since the metallic alkoxide is added to the siloxane polymer as a material of the optical waveguide, mixing in an arbitrary mixing ratio is facilitated, the refractive index of the waveguide can be arbitrarily set in accordance with the amt. of the alkoxide added and fine control of refractive index is enabled even in the production of a single-mode optical waveguide. |
