| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for measuring the accurate energy density distribution of a laser beam in the entire effective width of the beam so as to contribute to the improvement in the accuracy of a laser ablation processing. SOLUTION: The apparatus for measuring the energy density distribution of a laser beam comprises laser beam transmitting means 14 for transmitting the beam 2 while preventing the reflection of the beams 2 sequentially from the upstream side on the optical path of the reflected beam by a reflecting mirror 30, vertical direction moving means to the optical path of a CCD camera 10 which outputs charge amount responsive to the beam quantity of the beam at an element unit, a video freezer 12 for performing the role of averaging the number of pulses of the beam detected by the camera, and a computer 13 for measuring the beam quantity distribution of the beam based on the sensed charge amount. When the camera senses the predetermined number of pulses, the data input is cut off by the command from the computer, and the camera 10 makes it possible to move at the length of the camera. |
