发明名称 HEAT TREATMENT BOAT
摘要 <p>PROBLEM TO BE SOLVED: To provide a structure of heat treatment boat for a vertical heat treatment apparatus on several columns of which trays such as trays in ring form are placed almost horizontally and with a space between top and bottom. With this structure, the boat easily fixes a tray in ring form without welding. SOLUTION: A notch 4 extending from the upper end toward the lower end of a column 23 on front side is formed. A notch 6 is also formed on the periphery of the tray 3 in ring form. The periphery of the tray 3 in ring form is put in slots 20 of each of the columns 23-28 and a fixing rod 5 is threaded in a space formed by the notches 4 and 6 from the top toward the bottom to engage the tray 3 on the column 23. A protrusion 51 is provided on the periphery on the other side of the tray 3 in ring form. The tray 3 in ring form is rotated and engaged on the column 24.</p>
申请公布号 JPH09237781(A) 申请公布日期 1997.09.09
申请号 JP19960069238 申请日期 1996.02.29
申请人 TOKYO ELECTRON LTD 发明人 SHIMAZU TOMOHISA;NAKAO MASARU
分类号 H01L21/673;H01L21/22;H01L21/31;H01L21/68;(IPC1-7):H01L21/31 主分类号 H01L21/673
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