| 摘要 |
PROBLEM TO BE SOLVED: To determine the accurate mechanical constant of an object to be vibration-controlled and to control a vibration control device with high precision based on the mechanical constant. SOLUTION: Through drive of an actuator 7A and the other actuator for a vibration insulation device are driven by a second control part 12 prior to actual operation, the vibration state of an exposing device body 30 comprising the main parts of a projection exposing device, such as a reticule 28, a reticule stage 27, a wafer 22, and a wafer stage 20; first and second columns 24 and 26 to support the main parts; and a platen 6 to support the members described above is measured by acceleration sensors 32A 32D and displacement sensors 33A-33C, and the mechanical constant of the exposing device body 30 is determined by a computing part 13. From the mechanical constant, a computing part 13 to determine a parameter by which a drive amount of each actuator is decided. A first control part 11 controls operation of each actuator during actual operation, based on the parameter. |
