发明名称 WATERPROOF MECHANISM OF WORK CARRYING ROBOT
摘要 PROBLEM TO BE SOLVED: To provide a waterproof mechanism of a work carrying robot using a waterproof pan capable of effective waterproof measures without generating a friction force by a mechanical seal at each joint part. SOLUTION: In a work carrying robot, two arms 25, 27 are fitted to a robot body part 10 through two joint parts 35, 37, and holding mechanisms 33-1(33-2) to hold a work 60 are fitted to the arm 27. A waterproof pan 50 larger than the work 60 is fitted between the work 60 held by the holding mechanisms 33-1(33-2) and the robot body 10. A water exhausting pipe 51 is connected to the waterproof pan 50, and the water exhausting pipe 51 is inserted in a second waterproof pan 53 provided on an outer circumferential side surface of the robot body 10. A water exhausting pipe 55 connected to the second waterproof pan 53 is inserted in a gutter 57.
申请公布号 JPH09234688(A) 申请公布日期 1997.09.09
申请号 JP19960069260 申请日期 1996.02.28
申请人 EBARA CORP 发明人 TOGAWA TETSUJI;YAMAGUCHI KUNIAKI;SAKURAI KUNIHIKO
分类号 B25J9/06;B25J19/00;H01L21/304;H01L21/677;H01L21/68;(IPC1-7):B25J19/00 主分类号 B25J9/06
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