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经营范围
发明名称
PLASMA TREATMENT APPARATUS
摘要
申请公布号
JPH09234362(A)
申请公布日期
1997.09.09
申请号
JP19960046077
申请日期
1996.03.04
申请人
ANELVA CORP
发明人
OGAWARA YONEICHI
分类号
H05H1/46;B01J19/08;C23C16/44;C23C16/50;C23F4/00;(IPC1-7):B01J19/08
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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