发明名称 POSITIVE TYPE PHOTORESIST COMPOSITION
摘要 PROBLEM TO BE SOLVED: To form a resist pattern excellent in adhesion to a substrate in the production of a semiconductor device, LCD, etc., without deteriorating the shelf stability of a resist by adding specified imidazole to a compsn. consisting of alkali-soluble novolak resin and a compd. having a quinonediazido group. SOLUTION: A compd. (imidazole) represented by the formula is added as an adhesion improver to a basic compsn. consisting of alkali-soluble novolak resin and a compd. having a quinonediazido group by 0.05-20 pts.wt., preferably 0.5-10 pts.wt. per l00 pts.wt. of the basic compsn. In the formula, R1 is vinyl, benzyl, etc., and R2 is 1-5C alkyl or H.
申请公布号 JPH09236923(A) 申请公布日期 1997.09.09
申请号 JP19960044587 申请日期 1996.03.01
申请人 SHIPLEY FAR EAST KK 发明人 NAKANO SHIGEKI;AWAJI AKIRA;YAMADA SHINTARO
分类号 G03F7/022;G03F7/085;H01L21/027;(IPC1-7):G03F7/085 主分类号 G03F7/022
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