| 摘要 |
PROBLEM TO BE SOLVED: To facilitate maintenance work of the inside of a processing tank. SOLUTION: A lower part carrier roller 2 is furnished with roller shafts 22, 23 orthogonal in the substrate carrying direction and a substrate loading roller 24 provided free to roll together around these roller shafts 22, 23, and the central roller shaft 23 with the substrate loading roller 24 installed on it and the side part roller shaft 22 concentrically extended to both end parts of this central roller shaft 23 are connected to each other free to be separated through a connecting means on a substrate carrier device to carry a substrate B by synchronous rotation of a plural number of the lower part carrie rollers 2 provided in parallel along the carrying direction. |
