| 摘要 |
The detector has at least one acceleration sensor with a substrate and a parallel seismic mass (10) displaced in the direction of a sensitivity axis. The mass is displaced against a spring bias and carries a capacitor electrode which cooperates with a pair of stationary capacitor electrodes (12,14).The capacitor exhibits a capacitance dependent on the position of the seismic mass, with polarisation of the latter for bringing it to a potential in the vicinity of the substrate potential |
