| 摘要 |
PROBLEM TO BE SOLVED: To improve a laser oscillator in maintainability. SOLUTION: A laser oscillator is equipped with a laser chamber 105 filled with laser gas, a gas piping provided between the laser chamber 105 and the outside to supply or exhaust laser gas to or from the laser chamber 105, and/or a water piping provided between the laser chamber 105 and the outside to supply or exhaust water to or from the laser chamber 105, wherein laser gas is excited to oscillate laser beams. In this case, a piping mounting means which is capable of mounting the gas piping and/or the water piping on the laser chamber 105 in a detachable manner and a leakage preventing means which prevents laser gas and/or water from leaking out of the laser chamber 105 and the gas piping and/or the water piping when the gas piping and/or the water piping are dismounted from the gas chamber 105 by the piping mounting means are provided. |
