MAGNETICALLY NEUTRAL LINE DISCHARGE TYPE PLASMA UTILIZATION DEVICE,申请号JP19960033441-传众专利搜索

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发明名称	MAGNETICALLY NEUTRAL LINE DISCHARGE TYPE PLASMA UTILIZATION DEVICE
摘要
申请公布号	JPH09232097(A)	申请公布日期	1997.09.05
申请号	JP19960033441	申请日期	1996.02.21
申请人	ULVAC JAPAN LTD	发明人	UCHIDA TAIJIROU
分类号	H05H1/46;(IPC1-7):H05H1/46	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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