| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve the responsivety, measuring accuracy and mechanical strength, by setting a non-heat-generating band of a width corresponding to the thickness of an electrically insulating substrate between a pair of heat- generating resistor element arranged on the substrate parallel to a flow direction. SOLUTION: A non-heat-generating band of a width 5 equal to or twice a thickness 6 of a ceramic substrate 4 of alumina or the like is formed between an upstream heat-generating resistor element 2 and a downstream heat- generating resistor element 3 arranged on the substrate 4 close to the upstream and downstream of a flow to a flowing direction of a fluid. When the ratio of the band width 5 to the thickness 6 is not larger than 1, output noises are large. On the contrary, as the width 5 becomes larger, responsivity is worsened. Therefore, the width 5 of the non-heat generating band is set in a ratio range of 1-2 where noises are not large and the responsivity is not greatly changed. In this manner, a substrate structure with superior mechanical strength, measuring accuracy and responsivity is obtained.</p> |
